A MEMS Clearinghouse® and information portal
for the MEMS and Nanotechnology community
RegisterSign-In
MEMSnet Home About Us What is MEMS? Beginner's Guide Discussion Groups Advertise Here
News
MEMSnet Home: MEMS-Talk: SOG for wafer bonding
SOG for wafer bonding
2004-02-13
Zhimin J Yao
SOG for wafer bonding
Zhimin J Yao
2004-02-13
Hi,

Does anybody have experience with bonding (anodic bond or wafer direct
bond) using wafers that have a layer of spin on glass?  We have tried
Accuglass T-12B with the 512B dilution, spin coated on Si wafers followed
by curing, and the wafers did not bond well (compared with glass to glass
direct bond).

Any suggestions?

Zhimin




reply
Events
Glossary
Materials
Links
MEMS-talk
Terms of Use | Contact Us | Search
MEMS Exchange
MEMS Industry Group
Coventor
Harrick Plasma
Tanner EDA
Addison Engineering
The Branford Group
Process Variations in Microsystems Manufacturing
University Wafer