Michael--
There is no thickness limit per se, if you have good adhesion and relatively
low stress.
Use an adhesion layer of Ti, TiW, or Cr.
Sputter the tungsten with a low-stress recipe.
I have deposited a few microns onto silicon nitride.
See my dissertation, Ch. 6, for background and details, at
http://www-bsac.eecs.berkeley.edu/archive/kirt_williams_phd.zip
    --Kirt Williams

----- Original Message -----
From: 
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Sent: Friday, February 13, 2004 2:04 PM
Subject: [mems-talk] questions for Tungsten on BCB


> I am planning to deposit/sputter 1um-thick tungsten onto the BCB
substrate. is
> there anyone who has such kind of experience so can give me some advice? I
am
> concerned with the adhesion and thickness limit and the uniformity
regarding
> this process.
> Michael