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MEMSnet Home: MEMS-Talk: Adhesion promotor for Photoresist on Au
Adhesion promotor for Photoresist on Au
1997-03-14
Ying Xu
Adhesion promotor for Photoresist on Au
Ying Xu
1997-03-14
Hi, there,

Does anyone know a good adhesion promotor for photoresist (Shipley 1818)
on Au? My problem is I need to squeeze the PR, but under pressure
the PR tends to crash. Is there a way to reduce the brittleness of the PR?
Thanks in advance.


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