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MEMSnet Home: MEMS-Talk: Alumina safe isotropic Silicon etchant
Alumina safe isotropic Silicon etchant
2004-02-18
Tripp, Marie Kathleen
2004-02-18
William Lanford-Crick
2004-02-19
Cyrille Hibert
2004-02-18
Fabio Tagliareni
2004-02-18
Michael Marrs
Pt1000 RTD......
2004-02-19
Kamal Kishore
Alumina safe isotropic Silicon etchant
Tripp, Marie Kathleen
2004-02-18
Hello,  I am looking for an etchant (either wet or dry) that will isotropic etch
Silicon but not affect Alumina (Al22O3, Alumina Oxide).  Can anyone recommend
anything other than XeF2?  Thanks, Marie


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