There is essentially no chemistry that will etch Al2O3 (aluminum oxide) so
anything that etches Si will work....for isotropic etching, you will
generally need to use a wet etchant.

-----Original Message-----
From: [email protected]
[mailto:[email protected]]On Behalf Of
Tripp, Marie Kathleen
Sent: Wednesday, February 18, 2004 8:45 AM
To: [email protected]
Subject: [mems-talk] Alumina safe isotropic Silicon etchant


Hello,  I am looking for an etchant (either wet or dry) that will isotropic
etch Silicon but not affect Alumina (Al22O3, Alumina Oxide).  Can anyone
recommend anything other than XeF2?  Thanks, Marie

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