Hello friends

        I am trying to fabricate a Pt1000 resistor, on a floating membrane
of Silicon Nitride, for making a MEMS RTD. Can anybody suggest any
websites/papers/books where i can find the techniques of thermal anlysis
of this kind of sensors. Any suggestion in this regards will be
apreciated.

Thanks

Kamal Kishore









     Kamal Kishore                     Phone :(0172) 2237401 to 10
     Engineer,VLSI:FAB                 Ext:576,550,570,441
     Semiconductor Complex Limited.    Fax:(0172)-2236378,2236885
     Sector 72(Indl.Area),S A S Nagar,
     Mohali, Punjab- 160071