Hi Peng,

        I think you can first try the website of the resist manufacturer,
www.clariant.com and look for your resist data. I've seen similar data
from their website. If it's not there, you may ask their application
engineer to give you those data as well. Tim Watkins is the person I
usually contact with. His email address is [email protected]


Yours sincerely,

Isaac Chan

Ph.D. Candidate
Dept. Electrical & Computer Engineering
University of Waterloo
200 University Ave. W
Waterloo, Ontario, Canada
N2L 3G1
Tel: (519) 888-4567, ext. 6014
Fax: (519) 746-6321
[email protected]
http://www.ece.uwaterloo.ca/~a-sidic


On Wed, 18 Feb 2004, Peng Yao wrote:

> Hi everyone,
> I am working on Az5214 photoresist. In order to model the lithography
> process, I have to know a lot of modeling parameters like A,B,C,
> diffusivity at different temperature, amplifying coefficient...
> Unfortunately, I don't have all the facilities that is need to measure
> those data. I am wondering if anyone knows anywhere I can get help from?
> Thanks a lot!
>
> Peng Yao
> DOEs lab
> Electrical Engineering Dept.
> Univeristy of delaware
> Newark D.E 19716
>
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