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MEMSnet Home: MEMS-Talk: help needed on release test
help needed on release test
2004-02-19
Jiaping Yue
help needed on release test
Jiaping Yue
2004-02-19
hello, everyone, i now have a structure that seems released. the structure is a
frame with legs around a block that connects to some pads. the legs connected to
the frame are folded like spring and fixed to the substrate with 2 anchors at
the ends. both the frame and legs connected to it are released.  they are 2um in
width, 7um in depth, and tens of microns in length. is there any mechanical or
electrical way to test if they are released? thanks in advance.
jp
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