If it is possible, you might wanted to add some sort of Freon (i.e. CF4 or
CHF3 in particular) or argon. Since gold is your underlying layer, I would
recommend adding CF4. It should speed up your process and clean up any
debris.


Michael Marrs
Process Engineer
Trion Technology
+1 (480) 968-8818 ext. 25
[email protected]