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MEMSnet Home: MEMS-Talk: Re: MEMS cantilever (sandeep c)
Re: MEMS cantilever (sandeep c)
2004-02-23
Arti Tibrewala
SF6 RIE white polymeric deposition (Not DRIE)/ What is it?
2004-02-23
ShuTing
Re: MEMS cantilever (sandeep c)
Arti Tibrewala
2004-02-23
Hi Sandeep,
To know how much force you can apply on cantilever you must calculate it
theotically. You must know the thickness of your cantilever, lenght of the
cantilever and then accordindly calculate the force you need to apply. You
can find the formula in any MEMS book for example in Handbook of Sensors and
Actuators by M-H.Bao. There are different formuls for different
cantilever....depending on fixed, Double clamed, single clamed...etc.
I hope this helps.
Arti
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Subject: MEMS-talk Digest, Vol 16, Issue 30


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> Today's Topics:
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>    1. Re: ANSYS ESSOLV modelling ? (Zhili Hao)
>    2. Re: Convection coeff for an assembled component !
>       (Michael D Martin)
>    3. MEMS cantilever (sandeep c)
>    4. How to remove carbon from Ta film (Suhua Jiang)
>    5. adhesion of oxide to evaprated chromium (Anna Ohlander)
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