Anthony,
To etch the ITO, HCl will work. Data on HCl etching of ITO can be found
here:
http://www.betelco.com/sb/phd/ch5/c52.html
Commercial ITO Etchant
http://www.transene.com/tino.html
MSDS can be found
http://grover.mirc.gatech.edu/data/msds/406.html
This is made up of FeCl-HCl-H2O. If you hunt around a bit, you should be
able to find the proportions of each etchant required.
Both etchants will leave SiO2 unetched, to my knowledge.
Good Luck,
************************************
Philip D. Floyd, Ph.D.
Iridigm Display Corporation
2415 Third Street, Suite 235
San Francisco, CA 94107
ph: (415) 626-8800 x138
fax: (415) 626-9775
email: [email protected]
web: http://www.iridigm.com/
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-----Original Message-----
From: Anthony [mailto:[email protected]]
Sent: Monday, February 23, 2004 5:33 AM
To: [email protected]
Subject: [mems-talk] ITO Etch selective to glass
I am looking for an etch that will remove Indium Tin Oxide (ITO) on a glass
lens without damage to the lens. The ITO will need to be patterned. What
would be the best approach to do this?
Anthony Marrs
Intellite
[email protected]
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