Hi All,

Iam a graduate student in Mechanical Engineering. Iam working on a project
Microfabrication of tactile sensors.
The design in which iam working involves a rigid cylider surrounded by a
compliant one. on a substrate made of silicon. 2 PVDF elements are placed one
under rigid cylinder and another under both rigid and compliant one.I have some
questions on how to proceed-

1)  Can i use Polysilicon as a rigid cylinder and a polymer as a compliant
cylinder surrounding the rigid one.And if i can use how can i deposit a polymer.

2)  This design involves a substrate, 2 PVDF element, rigid cylinder, compliant
cylinder all of different materials. Can i microfabricate using MUMPS Process.If
so how to go about it.

3) can anyone suggest me where i can find enough materials on MUMPS process. i
would like to know more devices that are fabricated by MUMPS.

Thanking you,

Nagarajan


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