Dear MEMS colleagues:
Is there a robust micro gripper (readily available commerically or
otherwise) that can be attached to the probe stage and carry a
micron-sized object to a specific location on the wafer?
Thanks.
Suresh
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Suresh G.K. Ananthasuresh
Assistant Professor
297 Towne Building, MEAM
The University of Pennsylvania
220 S. 33rd Street, Philadelphia, PA 19104-6315
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Towne Tel: (215) 898-7191; Grasp lab Tel: (215) 898-2430
FAX: (215) 573-6334
E-mail: [email protected]
URL: http://www.seas.upenn.edu/~gksuresh
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