Hello,

  I am having problem with Ti resistance bellow thick nitride. The Ti arms
are 0.16 um thick and open at edges.Silicon nitride is then sputtered ~ 1um
on top of it.  Does the thick nitride deposition on top of Ti affect its
resistance or affect its charateristic? The Ti arm lenght is ~ 200 um.


Thanks,

Aasutosh Dave


NanoFab Center
Arlington, Texas

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