UV sensitive tape adhesive residue removal from silicon
chips
Mohan Natesan
2004-02-27
Can someone suggest a strong organic solvent or something else to remove
(dissolve) glue residues from UV sensitive tape. These residues are on
silicon chips. I have already tried acetone, piranha and ozone cleaning
with out success. I need a clean surface for my studies, hence tweezers
are not an option. Thanks.
Mohan Natesan Ph.D.
Protiveris, Inc.
[email protected]