I am an undergraduate student finishing my Senior Design Project of single fixed
cantilevers beams currentlly in the the process flow in pre-sac ox release mode.
I need to relases the beams from the Oxide so that I can begin testing them. The
lab that I will be conducting the release is very rudimentary, but I have the
availability of HF to remove the SACOX holding the beam and TEOS Hard Mask that
remains on top of the Poly beam, however I am worried about Stiction, or the
beam collapsing If I were to dillute the HF with DI Water following release and
then either spin dry the wafer or dip the wafer in Isopropyl alcohol (to rid the
DI water and it's surface tension) followed by placing the sample on a Hot plate
rather quickly to rid the Alcohol. If anyone has any thoughts on this propsed
process or other tried methods that might function in a basic lab setting for
the release of the beams, it would very much appreciated.

Regards,
Ryan Goodwin
[email protected]