Please help me!

I want to etch the back side of silicon wafer using KOH solution without
damaging some devices on the front side of wafer.

I got a little information there was a photoresist for protecting the devices in
case of etching the back side of the wafer. However, I couldn't get the exact
information  about the photoresist.

As you know the photoresist or chemicals, please let me know it ASAP.


Divison of physical metrology/ Mass and Force Lab(NRL,
http://force.kriss.re.kr/)
Korea Research Institute of Standards and Science(http://www.kriss.re.kr)
P.O. Box 102, Yusong-Gu , Daejeon, 305-600, South Korea
Phone : 82-42-868-5241, Fax : 82-42-868-5249, PCS : 016-433-1076
E-mail : [email protected], Web: http://my.dreamwiz.com/phdjhkim/