What's ito?

-----Message d'origine-----
De : jo ed [mailto:[email protected]]
Envoyé : mardi 2 mars 2004 13:15
À : [email protected]
Objet : [mems-talk] oxide wet etch on ito


Hello

I have a substrate coated with ito followed by oxide.
Does anyone know of a selective wet etch process to
remove the oxide put keep the ito?

cheers,
Jo

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