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Gold diffusion barrier
2004-03-02
William Lanford-Crick
Gold diffusion barrier
William Lanford-Crick
2004-03-02
Hi group,
I need a conductive barrier metal to prevent Gold from diffusing into ohmic
metal after 850deg C annealing.

50 nm Moly is OK.  Surface morphology is still somewhat rough after annealing.
Any ideas of what might be better?
-Bill


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