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MEMSnet Home: MEMS-Talk: evaporation of nickel on nitride
evaporation of nickel on nitride
2004-03-02
GuyHaché
2004-03-03
Kirt Williams
2004-03-03
William Lanford-Crick
2004-03-03
Phillipe Tabada
2004-03-04
ROSTAING Cedric 177671
evaporation of nickel on nitride
William Lanford-Crick
2004-03-03
You could try a Ti or Cr adhesion layer, preferable evaporated 'in-sutu'.  15 -
20 nm should be sufficient.

I don't know about Ni sticking to Nitride...it doesn't adhere well to many
things.

Bill

>Hi,
>
>We want to evaporate Nickel on Nitride (vacuum of 10-5 before evaporation), but
>we have some problems with adhesion.  When we do the lift-off, the nickel
>doesn't stick.  So my first question would be, is Nickel suppose to stick to
>Nitride?  If so, how could I have better adherence?


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