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MEMSnet Home: MEMS-Talk: evaporation of nickel on nitride
evaporation of nickel on nitride
2004-03-02
GuyHaché
2004-03-03
Kirt Williams
2004-03-03
William Lanford-Crick
2004-03-03
Phillipe Tabada
2004-03-04
ROSTAING Cedric 177671
evaporation of nickel on nitride
Phillipe Tabada
2004-03-03
>From: Guy Haché 
>Reply-To: General MEMS discussion 
>To: [email protected]
>Subject: [mems-talk] evaporation of nickel on nitride
>Date: Tue,  2 Mar 2004 15:01:54 -0500
>
>Hi,
>
>We want to evaporate Nickel on Nitride (vacuum of 10-5 before evaporation),
>but
>we have some problems with adhesion.  When we do the lift-off, the nickel
>doesn't stick.  So my first question would be, is Nickel suppose to stick
>to
>Nitride?  If so, how could I have better adherence?
>
>Thank's
>
>Guy Haché, M.Sc.A.
>Assistant de recherche, research assistant


Hi Guy

Evaporating a 100-200 A chrome layer should provide you with the adhesion
you require.

Phil Tabada

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