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MEMSnet Home: MEMS-Talk: High-g Acceorometer Design
High-g Acceorometer Design
2004-03-03
\"Ozgur Erdener\"
2004-03-03
Mary-Ann Maher
adhesive based wafer bonding
2004-03-04
Robert Dean
2004-03-04
Erik Jung
High-g Acceorometer Design
\"Ozgur Erdener\"
2004-03-03
Hi all,
I am the new member of memstalk mail list.I want to work on designing of
High-g MEMS accelorometer as my Post garduate Thesis.I am experienced at
ASIC design but MEMS is a new area for me,so I will have a few question
described below.I will be glad if someone reply me.

1)Is PolyMUMPS process suitable for the desing of High-g (for instance +-150g)
accelorometers?
2)I have MEMS Pro 3v2 and I wonder if is it possible to integrate Design
Kit(Technology Files) of AMS 0.8 or 0.35 micron CMOS process to this
environment?
3)Can Anybody tell me if there is functional difference between Tanner's
L-Edit&T-Spice and L-Edit&T-Spice which have been in MEMS Pro Environment.
For instance,is L-Edit in MEMS Pro cover all the functionalities of Tanner's
L-Edit?

Thank You All

Ozgur ERDENER

Istanbul Technical Universty
Electronic and Communication Engineering Department
Istanbul/Turkey





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