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MEMSnet Home: MEMS-Talk: Parylene Data for thermomechanical simulation
RIE of poly-Si on Si3N4
2004-03-03
Makuc, Boris
Parylene Data for thermomechanical simulation
2004-03-04
Erik Jung
2004-03-04
Michael D Martin
Parylene Data for thermomechanical simulation
Erik Jung
2004-03-04
Dear all,
for a thermomechanical simulation of a parylene layer I would need to obtain
the viscoelastic data of the material.
As a start, the temperature dependency of the CTE and modulus would also be
appreciated.

Thank you for your help!

Erik Jung
Fraunhofer IZM



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