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MEMSnet Home: MEMS-Talk: adhesive based wafer bonding
High-g Acceorometer Design
2004-03-03
\"Ozgur Erdener\"
2004-03-03
Mary-Ann Maher
adhesive based wafer bonding
2004-03-04
Robert Dean
2004-03-04
Erik Jung
adhesive based wafer bonding
Robert Dean
2004-03-04
Hello,

Does anyone know which adhesives have been successfully used to bond
silicon wafers together, in place of fusion, anodic, gold thermocompression
or eutectic solder wafer bonding?

Sincerely,

Robert Dean
Auburn University



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