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MEMSnet Home: MEMS-Talk: Resistivity measurment thin film, van der Pauw
Resistivity measurment thin film, van der Pauw
2004-03-04
Stefan Junge
2004-03-04
Juan Pablo Saenz
2004-03-04
Rajesh R
Resistivity measurment thin film, van der Pauw
Stefan Junge
2004-03-04
hello,

does anybody know a book or paper where the theory of
van der Pauw structures is described? I want to measure
the thin film resistivity and need more information about
the van der pauw structures or the "cloverleaf" structure?

Regards,
S. Junge


--
Institute for Microsensors, -actuators and -systems (IMSAS)
University of Bremen
Dipl.-Ing. Stefan Junge (Ph.D student)
Dep. 1: Physics/Electrical Engineering
Otto-Hahn-Allee
28359 Bremen, Germany

P.O. Box 330 440
28334 Bremen, Germany

Tel.: +49-421-218-3586
Fax.: +49-421-218-4774
E-Mail: sjunge(at)imsas.uni-bremen.de
Internet: www.imsas.uni-bremen.de


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