Hello Robert,
BCB works great for adhesive bonding depending on what you plans for the bonded
stack is.  Will this be a permanent bond or will you need to separate a
processed wafer from a carrier?  SU8 can also be used as well as many different
kinds of wax.  Feel free to give me a call and I can send you some papers and
info.

Brad Johnson
Suss MicroTec
Applications Engineer
1-800-685-7877
bjohnson@suss.com


>>> rdean@eng.auburn.edu 03/04/04 11:01AM >>>
Hello,

Does anyone know which adhesives have been successfully used to bond
silicon wafers together, in place of fusion, anodic, gold thermocompression
or eutectic solder wafer bonding?

Sincerely,

Robert Dean
Auburn University