You may have already look at this but I found some good material there,

NIST Semiconductor Electronic Division
 http://www.eeel.nist.gov/812/hall.html

Arizona State University
http://www.eas.asu.edu/~fppf/bround.htm

Also look for the ASTM International standards like the F 1529-97

More information on resistivity on thin films is provided in documentation
related with "the four point probe method"
Some of the references in the links above will help.

Hope this helps,

Juan Pablo Saenz
Thin Film Lab

----- Original Message -----
From: "Stefan Junge" 
To: [email protected]
Sent: Thursday, March 04, 2004 8:05 AM
Subject: [mems-talk] Resistivity measurment thin film, van der Pauw


> hello,
>
> does anybody know a book or paper where the theory of
> van der Pauw structures is described? I want to measure
> the thin film resistivity and need more information about
> the van der pauw structures or the "cloverleaf" structure?
>
> Regards,
> S. Junge
>
>
> --
> Institute for Microsensors, -actuators and -systems (IMSAS)
> University of Bremen
> Dipl.-Ing. Stefan Junge (Ph.D student)
> Dep. 1: Physics/Electrical Engineering
> Otto-Hahn-Allee
> 28359 Bremen, Germany
>
> P.O. Box 330 440
> 28334 Bremen, Germany
>
> Tel.: +49-421-218-3586
> Fax.: +49-421-218-4774
> E-Mail: sjunge(at)imsas.uni-bremen.de
> Internet: www.imsas.uni-bremen.de
>
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