For an introduction to MEMS, I suggest two places:

First, a graduate student at U. Surrey (England) has set up some very
informative web pages:

http://www.ee.surrey.ac.uk/Personal/D.Banks/ueng.html


Second, the very first paper you should read is "Silicon as a Mechanical
Material" by Kurt Petersen. Proc IEEE vol 70, no 5. pp 420-457, May 1982.

heather klaubert
[email protected]


______________________________ Reply Separator _________________________________
Subject: References??
Author:  "Valdes; Erica R. (Petersen)"  at
internet
Date:    3/20/97 2:20 PM



Can you recommend some good review-type references on MEMS?  Something
that  would be appropriate in the context "If you would like to learn
more about MEMS refer to ________  "?

Thanks in advance!

Erica Valdes
U.S.Army ERDEC
[email protected]