> does anybody know a book or paper where the theory of
> van der Pauw structures is described? I want to measure
> the thin film resistivity and need more information about
> the van der pauw structures or the "cloverleaf" structure?
>
> Regards,
> S. Junge

Take a look at these, they may help you out:


http://www-inst.eecs.berkeley.edu/~ee143/s2003/Lab/four_point_probe.pdf
   http://www.esdjournal.com/techpapr/ohms.htm
   http://www.eeel.nist.gov/812/meas.htm
   http://electron.mit.edu/~gsteele/vanderpauw/vanderpauw.pdf

John Maloney
Senior MEMS Engineer
MicroCHIPS, Inc.
http://www.mchips.com