Robert,

BCB has been successfully used to bond wafers in both full coat and patterned
configurations.  To start I would suggest performing an Internet search using
"BCB" and "BONDING" as key words.  I found some of the same references I used to
set up my BCB bonding process.

Hope this helps,

Loren St. Clair

 -----Original Message-----
From:   Robert Dean [mailto:rdean@eng.auburn.edu]
Sent:   Thursday, March 04, 2004 8:01 AM
To:     General MEMS discussion
Subject:        [mems-talk] adhesive based wafer bonding

Hello,

Does anyone know which adhesives have been successfully used to bond
silicon wafers together, in place of fusion, anodic, gold thermocompression
or eutectic solder wafer bonding?

Sincerely,

Robert Dean
Auburn University


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