Hoi Stefan,

The link to the NIST  home page should help. It gives you not only the
theory behind resistivity measurement but also the specifications
on how the measurement has to be carried out (clover leaf structure).


http://www.eeel.nist.gov/812/effe.htm#vand


greetings,

Rajesh


______________________________

>From: "Stefan Junge" 
>Reply-To: General MEMS discussion 
>To: 
>Subject: [mems-talk] Resistivity measurment thin film, van der Pauw
>Date: Thu, 4 Mar 2004 17:05:51 +0100
>
>hello,
>
>does anybody know a book or paper where the theory of
>van der Pauw structures is described? I want to measure
>the thin film resistivity and need more information about
>the van der pauw structures or the "cloverleaf" structure?
>
>Regards,
>S. Junge
>
>
>--
>Institute for Microsensors, -actuators and -systems (IMSAS)
>University of Bremen
>Dipl.-Ing. Stefan Junge (Ph.D student)
>Dep. 1: Physics/Electrical Engineering
>Otto-Hahn-Allee
>28359 Bremen, Germany
>
>P.O. Box 330 440
>28334 Bremen, Germany
>
>Tel.: +49-421-218-3586
>Fax.: +49-421-218-4774
>E-Mail: sjunge(at)imsas.uni-bremen.de
>Internet: www.imsas.uni-bremen.de
>
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