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MEMSnet Home: MEMS-Talk: LT LPCVD of SiO2
LT LPCVD of SiO2
2004-03-05
Gerrit Myburg
LT LPCVD of SiO2
Gerrit Myburg
2004-03-05
Dear Sir/Madam

I am looking for a review article describing the low temperature (150C)
deposition of SiO2 using SiH4 and N2O gasses and UV lamps.


Thanks
Gerrit


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