Sumant

I got a vague idea about your process. The reason of bubbles in the
polyimide (Kapton) can be its thickness. How thick polyimide are you using.
Try using thicker films, you can also spin coat it 4 to 5 times. Depending
on the application, if you just want the Kapton with Gold on both sides -
you can get a Kapton sheet available and you can deposit gold on that.
Send me some details about your process.

Aasutosh Dave


>Hello,
>I am trying to fabricate a this stack on a silicon wafer:
>
>Silicon/Sacrificial layer/Gold/Ti/Polyimide/Ti/Au
>  At this point, I have two queries:
>
>Can i use any other sacrificial layer instead of PSG ( spin on glass) that
>would be easy to etch off without affecting the metals and polymide.
>
>Secondly for the above process, can i chage any of my polyimide processing
>steps to remove those bubbles and get a uniform polymide film.
>

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