When the stuff condenses it is back to PZT if they are fearful of the
target, then they can fear the condensate, if they are not then they ought
not fear. Gary Hillman BCerE, class of '60




-----Original Message-----
From:   S. S. Abhishek [SMTP:ssabhishek@yahoo.co.uk]
Sent:   Tuesday, March 09, 2004 1:31 PM
To:     mems-talk@memsnet.org
Subject:        [mems-talk] Problems with RF Sputtering of PZT

Hello everyone,

I am going to RF Sputter lead-zirconate-titanate (PZT)
onto platinized Si substrates. The problem I am having
is of Pb contamination, and so the cleanroom staff
here is very reluctant to allow any Pb inside. They
are afraid that Pb will be poisonous to users in the
clean room. Has anyone faced a similar problem before?
If so, please help me out here.

Thanks.

Abhishek Sivapurapu,
791 Atlantic Drive,
MiRC, Georgia Tech,
Atlanta, GA 30332

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