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MEMSnet Home: MEMS-Talk: MEMs Hinge fabrication
MEMs Hinge fabrication
2004-03-10
Gareth Hougham
2004-03-11
Michael L
MEMs Hinge fabrication
Gareth Hougham
2004-03-10



Can anyone point me to work on MEMs hinges? In particular, the kind of
hinges that allow mirrors etc to flip up out of plane?  I need a design
that is mechanically robust for relatively heavy loads and frequent
movement. As opposed to a one-time only actuation.

Thanks,
Gareth

Gareth Hougham, Ph.D.
Research Staff Member
38-113
IBM, T.J. Watson Research Center
P.O. Box 218,  Kitchawan Road
Yorktown Heights, NY 10598
(914) 945-1946
(914) 945-2141 fax
(914) 954-9447 cell



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