Dear Mr. Daven Chou
    You can use switch capacitor readout circuit. Pl. refer Y. Y. Qiu
in 'Sensors and Actuators-A', Vol 92 (2001) Page 80-87 to learn more
details.

RAJKUMAR

Semiconductor Complex Limited.
Sector-72, Industrial Area, SAS Nagar.
Mohali (Chandigarh), INDIA
Phone: 91-172-2237401 to 10 (extn. 576, 505)
Fax: 91-172-2236378


> Message: 5
> Date: Wed, 10 Mar 2004 17:30:30 +0800
> From: "daven chou" 
> Subject: [mems-talk] new circuit interface in integrated humidity
>       sensor
> To: 
> Message-ID: 
> Content-Type: text/plain;     charset="gb2312"
>
>  Dear everyone:
>         I wanna get the latest information about the circuit interface about
capacitive MEMS humidity sensor .I used polyimide as a sensitivity layer.
>         Thanks a lot!
> yours sincerely
> Daven Chou
>
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> End of MEMS-talk Digest, Vol 17, Issue 14
> *****************************************
>