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MEMSnet Home: MEMS-Talk: MEMs Hinge fabrication
MEMs Hinge fabrication
2004-03-10
Gareth Hougham
2004-03-11
Michael L
MEMs Hinge fabrication
Michael L
2004-03-11
Hi Gareth,

You could look at the following reference - this is for one-time actuation
during self-assembly, but it may be of interest to you nonetheless.

Equilibrium of hinged and hingeless structures rotated using surface tension
forces
Syms, R.R.A. (Imperial Coll of Science, Technology and Medicine) Source:
Journal of Microelectromechanical Systems, v 4, n 4, Dec, 1995, p 177-184

Regards,

Michael

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