I also try to use deposited silicon to etch glass. I don't know if it works.
Lanzy

----- Original Message -----
From: "Isa Kiyat" 
To: "General MEMS discussion" 
Sent: Thursday, March 11, 2004 4:26 PM
Subject: [mems-talk] 10 um SiO2 etch?


> Nowadays, I am trying to etch 10 um thermal SiO2 using both HF and RIE.
Can
> anyone suggest a recipe for RIE and possible hard mask material. We tried
> sputtered Si but it failed.
> Thanks.
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> Isa Kiyat
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