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MEMSnet Home: MEMS-Talk: Polyimide spin coating
Polyimide spin coating
2004-03-11
Maddy Singh
Polyimide spin coating
Maddy Singh
2004-03-11
Hi
Can anybody tell me how to prepare the polyimide solution for spin coating it on
glass substrate and the spin curves. I want to deposit polyimide in nano meter
thickness.

Thanks
Maddy

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