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MEMSnet Home: MEMS-Talk: RE: metallization on alumina substrate
RE: metallization on alumina substrate
2004-03-12
CK Lin
RE: metallization on alumina substrate
CK Lin
2004-03-12
Hello,

I am trying to pattern gold onto alumina substrate.  I plan to use Ti as my
adhesion layer.  Is there a special cleaning method or other
protocols(plasma, ultrasonic?) in order to have good adhesion?  At this
point, I am assuming piranha will be able to clean the organics off the
substrate and evaporation will do the job.

Please advise any reference and/or recipes.

Thank you!

CK




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