A
MEMS Clearinghouse
®
and information portal
for the MEMS and Nanotechnology community
Register
Sign-In
MEMSnet Home
About Us
What is MEMS?
Beginner's Guide
Discussion Groups
Advertise Here
News
MEMSnet Home
:
MEMS-Talk
:
anisotropic ITO dry etch
Ni dry etch
2004-03-12
Yuzhu Li
anisotropic ITO dry etch
2004-03-12
Yuzhu Li
anisotropic ITO dry etch
Yuzhu Li
2004-03-12
Hi, I need to anisotropicly dry etch 1000A ITO with ICP etcher, any suggestion on gas and recipies?
reply
Events
Glossary
Materials
Links
MEMS-talk
