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Platinum Annealing conditions
2004-03-13
Ilan Gluzman
Platinum Annealing conditions
Ilan Gluzman
2004-03-13
Dear Mr. Nagle,

I read your post on [mems-talk] regarding Pt annealing.  I will anneal Pt
(99.997%) at various temperatures and times, and could use some help on those
two variables.  Do you have any recommendations on where to find a good
reference.   Thank you for your time.

Sincerely,
Ilan Gluzman


"Grain growth of the as-deposited Pt columns was observed after annealing at 650
degrees C, and extensive changes in the Pt microstructure were apparent
following a 750 degrees C anneal for 20 min. In addition, two types of defects
were identified on the surfaces  of annealed substrates."

http://mail.mems-exchange.org/pipermail/mems-talk/2003-December/011868.html

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