Hi All,

What about using SU-8 photoresist as an etch stop mask since it is resistant to
most of the etchants.

regards

Han

>Date:          Fri, 12 Mar 2004 01:05:54 +0800
>From:          "lanzy"  [add to address book] >[protect or block
sender]
>Subject:       Re: [mems-talk] 10 um SiO2 etch?
>To:    "General MEMS discussion" 
>Reply To:      General MEMS discussion >

>I also try to use deposited silicon to etch glass. I don't >know if it works.
>Lanzy

>----- Original Message -----
>From: "Isa Kiyat" 
>To: "General MEMS discussion" 
>Sent: Thursday, March 11, 2004 4:26 PM
>Subject: [mems-talk] 10 um SiO2 etch?


> Nowadays, I am trying to etch 10 um thermal SiO2 using >both HF and RIE.
>Can anyone suggest a recipe for RIE and possible hard mask >material. We tried
sputtered Si but it failed.
> Thanks.
> =================================
>
> Isa Kiyat







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