Alignment marks are different depending on what A&E tool you use. Different
vendors (ie. Canon, Nikon, etc) use different marks. Even with the same
vendor, different generations of tools different marks. A printer doesn't
use the same marks as a stepper, in part due to the different alignment
lazers used. Contact your tool vender and they should be able to supply what
marks work best with that tool.

Robert

-----Original Message-----
From: [email protected]
[mailto:[email protected]]On Behalf Of Isa
Kiyat
Sent: Friday, March 12, 2004 1:34 AM
To: General MEMS discussion
Subject: [mems-talk] Alignment marks


I am designing a photomask. I will have a two step lithography with maximum
0.5 um tolerance. I need your suggestions about the kind of alignment marks
I should use (shape, dimension any experience will help) . Thanks.
=================================

Isa Kiyat




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