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MEMSnet Home: MEMS-Talk: Parylene coating
Parylene coating
2004-03-15
Chunmeng Lu
Parylene coating
Chunmeng Lu
2004-03-15
Hi,everybody,
Somebody suggests that I coat a layer of Parylene on a PDMS mold to prevent the
penetration of monomer During UV cure.but we don't have the special equipment
for coating Parylene.could somebody tell me if I can use regular CVD to coat
parylene?
Thanks,
Lu,Chunmeng

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