Is that Pyrex 7740?
What happens to the non-volatile reaction products like AlF3?
Are they sputtered off?
    --Kirt Williams

----- Original Message -----
From: "Shile" 
To: ; "'General MEMS discussion'" 
Sent: Monday, March 15, 2004 9:24 AM
Subject: RE: [mems-talk] Anisotropic etching in Pyrex glass


> For anisotropic Pyrex etch use SF6 RIE. It's a bit slow, but ~5 microns
> is easy to achieve in a capacitivly coupled etcher using a metal mask.
> Etching Pyrex to a depth of several hundred microns has been achieved
> with ICP systems.
>
> Roger Shile