Dear Roger,
do you have available references for ething deep cavities using ICP systems?
I would very much appreciate any data concerning such processes.
Thanks
Shay Kaplan

----- Original Message -----
From: "Shile" 
To: ; "'General MEMS discussion'" 
Sent: Monday, March 15, 2004 7:24 PM
Subject: RE: [mems-talk] Anisotropic etching in Pyrex glass


> For anisotropic Pyrex etch use SF6 RIE. It's a bit slow, but ~5 microns
> is easy to achieve in a capacitivly coupled etcher using a metal mask.
> Etching Pyrex to a depth of several hundred microns has been achieved
> with ICP systems.
>
> Roger Shile
>
> -----Original Message-----
> From: mems-talk-bounces+rshile=nanoink.net@memsnet.org
> [mailto:mems-talk-bounces+rshile=nanoink.net@memsnet.org] On Behalf Of
> jaina2@rpi.edu
> Sent: Sunday, March 14, 2004 4:23 PM
> To: mems-talk@memsnet.org
> Subject: [mems-talk] Anisotropic etching in Pyrex glass
>
> Hi,
>
> Please let me know if anisotropic etching is possible in Pyrex glass and
> if
> so, what is the technique ?
>
> Thanks.
>
>
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