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MEMSnet Home: MEMS-Talk: Anisotropic etching in Pyrex glass
Anisotropic etching in Pyrex glass
2004-03-15
jaina2@rpi.edu
2004-03-15
Shile
2004-03-15
Kirt Williams
2004-03-16
Shile
2004-03-15
shay kaplan
2004-03-15
jaina2@rpi.edu
2004-03-15
BobHendu@aol.com
2004-03-16
Shile
Anisotropic etching in Pyrex glass
BobHendu@aol.com
2004-03-15
Roger:

Can you remember who was able to etch a couple of hundred microns in Pyrex using
ICP systems. I have such systems and have not been able to etch anything
approaching that depth. Bob Henderson


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