The gray/black residues you see are antimonyoxide, the remains of the PAG in the
SU-8.
I use ultrasound in DI water to get complete removal of the residue powder.

Jacques Jonsmann


________________________________

Fra: [email protected] på vegne af YI-CHUN CHEN
Sendt: ti 16-03-2004 22:01
Til: [email protected]
Emne: [mems-talk] The residue after etching SU-8 by CF4



Dear all,

I tried to remove SU-8 by O2 plasma with adding a little bit CF4 but there are
some gray residues left after it was etched. The experiment condition I used is
80% O2 with 20% CF4 at 300 W in 300 mtorr. These residues can be scratched by
the razor but cannot be blew away by nitrogen gun. I also found that after
etching the height of SU-8 section is little lower than that of the other
sections (glass slide). I am not sure are these residues the product of glass
etching or just remnant of SU-8?
Could anyone give me some suggestions to remove these residues without making
damages to the substrate?
Your kind respond will be highly appreciated!

Ted



_______________________________________________
[email protected] mailing list: to unsubscribe or change your list
options, visit http://mail.mems-exchange.org/mailman/listinfo/mems-talk
Hosted by the MEMS Exchange, providers of MEMS processing services.
Visit us at http://www.memsnet.org/