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MEMSnet Home: MEMS-Talk: epi wafer vendor
epi wafer vendor
2004-03-17
Chen-Chuan Fan
epi wafer vendor
Chen-Chuan Fan
2004-03-17
Hi all,

I am looking for vendors that provide epi wafers with heavily boron-doped
epi layer on a lightly-doped silicon substrate. Structures will be created
in the p++ layer, which will serve as an etch stop when using anisotropic
etchants, KOH or TMAH, to remove the p-type substrate. Did anybody use
similar process before and can recommend me good wafer vendors for this
purpose?? Please reply to [email protected] Thanks you!



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